5 France 
3 Japan 
1 Hong Kong 
1 Australia 
1 China 
Wafer Vacuum Transfer Module Vtm300 - China
price: 180000.00 Dollar US$
Item HH400 HH500 HH600 HH700 HH800
Frame Welded tubular construction with support, The surface is coated with white paint
Wafer Transport Plane 1100mm(Per SEMI std.
E 21-91)
Process Facets
Up to 3 Up to 3 Up to 4 Up to 5 Up to 6
Vacuum Robot HHVRD3/4 HHVRD3/4 HHVRD3/4 HHVRD3/4 HHVRD3/4
Arm Blade Customized according to customer specifications, ;Optional: 1 Blade, 2 Blade and 4 Blade;Material optional
Load Locks Provides Load Locks(1 or 2) and Slot(1 or 2 or 4 etc) Number customization
Lid View Ports Optional Lid Lift Mechanism Lid Lift Mechanism Lid Lift Mechanism Lid Lift Mechanism
Option: Cooling Station, VPA Station or Separating Station
Optional Chamber
AWC < 0.05mm < 0.05mm < 0.05mm < 0.05mm < 0.05mm
Base Vacuum 5 x 10−8 Torr 5 x 10−8 Torr 5 x 10−8 Torr 5 x 10−8 Torr 5 x 10−8 Torr
Leak Rate <1 x10−9std.
cc/sec He <1 x10−9std.
cc/sec He <1 x10−9std.
cc/sec He <1 x10−10std.
cc/sec He <1 x10−9std.
cc/sec He
Company Contact:
- Phone: 17361797118
- Address: yuanhe road, suzhou , jiangsu , China
- Email:
Published date: September 6, 2024
- Business Description: Honghu (Suzhou) Semiconductor Technology Co., Ltd. was established in Suzhou in 2016 - We provide the advanced wafer transfer automation equipment for semiconductor industry with our years experience in wafer handle and transfer technology.
Honghu’s wafer transfer module systems include: Sorter/EFEM, Vacuum Transmission Module(VTM),SMIF and Ion implant Graphite.
Honghu provides the leading quality equipment and maintenance technical services, as well as trade services for consumables and spare parts.
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