9 Japan 
3 China 
1 Ireland 
1 Singapore 
Smif Versaport Has Been Exported Overseas - China
price: 10000.00 Dollar US$
ASYST Platform Mount
Wafer Size 200mm
Height 488.95mm
Width 370.84mm
Depth 396.24mm
Weight 15.87 Kg
Port Plate Height while operating 448.31mm from base
Port Plate Height at Home position 158.75mm
Speed 76.2mm per second
Mounting Customer-supplied mounting platform
Power 24 vdc (+10%, -5%) from external source 1.5 Amps standby 3.0 Amps typical during operation 4.0 Amps maximum
Laser Diode laser; Wavelength = 670nmLaser Power <1mW (Class II)NOTE- VersaPort is a Class I laser product when used with a SMIF-Pod.
Communications Serial RS-233C, SECSI/II, ASCII, Parallel
Environmental Operating Temperature 10°to 40° COperating Humidity 10%- 75%Storage Temperature -10° to +55° CStorage Humidity 5%- 90%
Company Contact:
- Phone: 17361797118
- Address: yuanhe road, suzhou , jiangsu , China
- Email:
Published date: September 6, 2024
- Business Description: Honghu (Suzhou) Semiconductor Technology Co., Ltd. was established in Suzhou in 2016 - We provide the advanced wafer transfer automation equipment for semiconductor industry with our years experience in wafer handle and transfer technology.
Honghu’s wafer transfer module systems include: Sorter/EFEM, Vacuum Transmission Module(VTM),SMIF and Ion implant Graphite.
Honghu provides the leading quality equipment and maintenance technical services, as well as trade services for consumables and spare parts.
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