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Smif Specification Lpt 2200 Has Been Exported Overseas - China
price: 40000.00 Dollar US$
Wafer Size: 200mm
Cassette Pick-up Position: 909mm (35.8 inches)
Cassette Positioning: To within ±0.005 inches (vertical)
SMIF-Pod Load Height: 900mm (35.5 inches)Nominal
Maximum Reach of Load Arm: (Measured from front face of LPT toH-bar of SMIF-Pod) 307mm (12.10 inches)Reversed Cassette Orientation
Height: 1578mm (62.13 inches)
Width: 457mm (18.00 inches)
Depth: 478mm (18.81 inches)
Weight: (Without SMIF-Pod, cassette, wafers) 170 pounds(77.27kg)
Speed of travel (Minienvironment): 57.2mm (2.25 inches) per second
Mounting: Tool mount.
May make use of an interface frame calibrated to lock the LPT into a repeatable position onto the Process Tool.
Power: 3.5 Amp (100-120vac)2 Amp (230vac)
LaserNOTE: LPT is a Class I Laser productwhen used with a SMIF-Pod Diode Laser; Wavelength = 670 nmLaser Power = <1mW (Class II)
Communications: Serial RS-232C (SECS I / SECS II), RS-485 (optional), Bi-directional Parallel LAN
Company Contact:
- Phone: 17361797118
- Address: yuanhe road, suzhou , jiangsu , China
- Email:
Published date: September 6, 2024
- Business Description: Honghu (Suzhou) Semiconductor Technology Co., Ltd. was established in Suzhou in 2016 - We provide the advanced wafer transfer automation equipment for semiconductor industry with our years experience in wafer handle and transfer technology.
Honghu’s wafer transfer module systems include: Sorter/EFEM, Vacuum Transmission Module(VTM),SMIF and Ion implant Graphite.
Honghu provides the leading quality equipment and maintenance technical services, as well as trade services for consumables and spare parts.
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