3 Japan 
1 Singapore 
1 Iran 
Efem Sorter Has Been Exported Overseas - China
price: 100000.00 Dollar US$
High Speed
320 WPH with OCR reading
1100 WPH without OCR reading
High Reliability
Robot Global Top Share (Yaskawa, hirata, Tazmo)
Key Components MCBF 15, 000, 000 cycles
Super Clean
Clean Class: ISO class1 The control technology and key components are all independently developed, achieving full localization.
The equipment is equipped with wafer handling robots (ROBOT), fully automatic loading systems (Load port), SMIF, flip mechanisms, and fully automatic edge inspection aligners (PA) with visual OCR functions.
Through Honghu's patented multi-specification wafer transfer solution, the equipment can not only be compatible with various sizes such as 4/6/8/12, enabling rapid switching of conventional silicon-based wafers, but also can accurately identify non-silicon-based material wafers through continuous deep learning.
Honghu equipment has been widely used in the field of silicon-based integrated circuit manufacturing and compound semiconductors such as SiC and GaN.
Company Contact:
- Phone: 17361797118
- Address: yuanhe road, suzhou , jiangsu , China
- Email:
Published date: September 6, 2024
- Business Description: Honghu (Suzhou) Semiconductor Technology Co., Ltd. was established in Suzhou in 2016 - We provide the advanced wafer transfer automation equipment for semiconductor industry with our years experience in wafer handle and transfer technology.
Honghu’s wafer transfer module systems include: Sorter/EFEM, Vacuum Transmission Module(VTM),SMIF and Ion implant Graphite.
Honghu provides the leading quality equipment and maintenance technical services, as well as trade services for consumables and spare parts.
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