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  • Plasma Enhanced Cvd Tube Furnace For Graphene Preparation - China

    price: 20000.00 Dollar US$

    Plasma enhanced CVD system consists of a plasma generator, a three-heating zone tube furnace, a single-heating zone tube furnace, an RF power supply, and a vacuum system.

    In order for the chemical reaction to take place at a lower temperature, the activity of the plasma is utilized to promote the reaction, and thus the CVD is called plasma enhanced chemical vapor deposition (PECVD).

    The PECVD graphene film preparation device ionizes a gas containing a film constituent atom by means of a RF output of 13.56 Mhz, forms a plasma in a vacuum chamber, utilizes strong chemical activity of the plasma, improves reaction conditions, and utilizes plasma activity to promote the reaction, then deposits a desired film on the substrate.

    Application range:

    This equipment can be used in various test places such as graphene preparation, sulfide preparation, and nanometer material preparation.

    Various films such as SiOx, SiNx, amorphous silicon, microcrystalline silicon, nano-silicon, SiC, diamond-like, etc.

    can be deposited on the surface of a sheet or similar shaped sample, and p-type and n-type doped films can also be deposited.

    The deposited film has good uniformity, compactness, adhesion, and insulation.

    It is widely used in the fields of cutters, high-precision molds, hard coatings, high-end decoration, etc.

    Please contact us by email for details.


    Company Contact:


    • Phone: +86 37155199322

    • Address: No. 820, 8th Floor, 1st Unit, 9th Block, Cuizhu Street, High-Tech Zone, zhengzhou , HeNan , China

    • Email: Email


    Published date: August 18, 2020

    • Business Description: Our mainlyproducts include high temperature furnace,include 1200/1400/1700 degree muffle furnace,1200/1400/1700 degree tube furnace, dental furnace, vacuum furnace,gold melting furnace, SiC heating element, MoSi2 heating element, alumina tubes and crucibles, and etc.

      We have our own manufacturing base factory as while as many sub-contracting factories, which enable us a reliable manufacturing ability and quality control system.

      We are capable of supplying both the equipment and technologies according to customers' different requirements and realities, and we have lots of successful projects in many different countries and regions, like East Europe, South Asia, South America, Australia and New Zealand, and Africa.

      "Profession, Quick Response, Hard Work, and Sincerity" is the strength of our team, earning us a sound reputation among our clients.

      We are open and willing to work with clients from different countries and regions.

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