Halogen Lamp Rtp Annealing Furnace For 6 Inch Wafer - China

The halogen lamp RTP annealing furnace is a 6-inch wafer rapid annealing furnace.

It adopts innovative heating technology to realize real substrate temperature measurement.

It does not need the temperature compensation of traditional rapid annealing furnaces.

The temperature control is accurate and the temperature is highly repeatable.

Customers include many international semiconductor companies and well-known scientific research teams.

It is an ideal choice for semiconductor annealing process.

Technical features:

• Real substrate temperature measurement without traditional temperature compensation

• Infrared halogen tube lamp heating

• Extremely excellent heating temperature accuracy and uniformity

• Fast digital PID temperature control

• Stainless steel cold wall vacuum chamber

• Good system stability

• Compact structure, small desktop system

• PC control with touch screen

• Compatible with normal pressure and vacuum environment, the standard value of vacuum degree is 5×10-3 Torr, and the vacuum degree is as low as 5×10-6 Torr using two-stage molecular pump

• Up to 3-channel gases (MFC control)

• No cross contamination, no metal contamination.

Substrate type:

• Silicon wafers

• Compound semiconductor wafers

• GaN/Sapphire wafers for LEDs

• Silicon carbide wafers

• Poly silicon wafers for solar cells

• Glass substrates

• Metals

• Polymers

• Graphite and silicon carbide susceptors Application areas:

Ion implantation/contact annealing, rapid thermal processing (RTP), rapid annealing (RTA), rapid thermal oxidation (RTO), rapid thermal nitridation (RTN), can be used in different environments such as vacuum, inert atmosphere, oxygen, hydrogen, mixed gas, etc.

SiAu, SiAl, SiMo alloying, low dielectric materials, crystallization, densification, solar cell bonding, etc.

Company Contact:

• Posted By: Zhengzhou CY Scientific Instrument Co., Ltd.

• Phone: +86 37155199322

• Address: No. 820, 8th Floor, 1st Unit, 9th Block, Cuizhu Street, High-Tech Zone, zhengzhou , HeNan , China

• Email:

• Website: https://www.cysi.wang

• Business Description: Our mainlyproducts include high temperature furnace,include 1200/1400/1700 degree muffle furnace,1200/1400/1700 degree tube furnace, dental furnace, vacuum furnace,gold melting furnace, SiC heating element, MoSi2 heating element, alumina tubes and crucibles, and etc.
  
  We have our own manufacturing base factory as while as many sub-contracting factories, which enable us a reliable manufacturing ability and quality control system.
  
  We are capable of supplying both the equipment and technologies according to customers' different requirements and realities, and we have lots of successful projects in many different countries and regions, like East Europe, South Asia, South America, Australia and New Zealand, and Africa.
  
  "Profession, Quick Response, Hard Work, and Sincerity" is the strength of our team, earning us a sound reputation among our clients.
  
  We are open and willing to work with clients from different countries and regions.