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1 France 
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1 Singapore 
1 Finland 
Mg Doped Lithium Niobate - China
price: contact company for price
Mg-doped lithium niobate crystals (MgLiNbO3) is a relatively
difficult crystal etching, the dry etching MgLiNbO3 rate and
etching morphology control is lithium niobate optoelectronic
devices one of the key technologies in processing.
The
Plasmalab System 100 Oxford instruments used to SF6 / Ar to
etching gas, specific research MgLiNbO3 with inductively
coupled plasma (ICP) etching rate power, reactive ion
etching (RIE), power, air chamber pressure and gas flow
ratio of the change of the etching parameters, such as, at
the same time study found SF6 / (Ar + SF6 gas flow ratio can
also affect the etching the roughness of the surface.
The
experimental results show that: in the ICP power is 1000 W,
RIE power is 150 W, the standard state (0 C, 1 standard
atmospheric pressure) gas under traffic for 52 mL/min, the
pressure of 0.532 Pa, SF6 / SF6 (Ar +) under the condition
of gas volume fraction of 0.077, the etching rate can be up
to 152 nm/min, etching the surface roughness is 1.37 nm,
etching depth is 2.5 mu m can be obtained, the surface of
the wall Angle is 74.8 ° flat ridge MgLiNbO3 structure.
Company Contact:
- Posted By: Jinan Jingzheng Electronics Co., Ltd.
- Phone: 8653166956298
- Address: China , jinan , China
- Email:
- Website: https://www.nanoln.com
Published date: May 27, 2013
- Business Description: Jinan Jingzheng electronic co., LTD. Is a professional production of
thin lithium tantalite, magnesium doped lithium niobate movies, LNOI
magnesium doped lithium niobate company
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